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Unique hardware features ensure the system offers versatility and flexibility for every measurement. A choice of two software controlled x-ray guide tubes with diameters ranging from a unique 10 µm through to 1.2 mm allow conditions to be optimised for a range of measurements, including both micro and macro. Similarly, with the unique Dual Vacuum Modes it is possible to switch within seconds between a high sensitivity full vacuum mode and a versatile localised vacuum mode. The latter maintains samples at atmospheric pressure whilst retaining sensitivity to all elements from sodium to uranium.
In any configuration the intelligent combination of optical cameras ensure that the precise analysis position can be quickly and simply located.
Single Point and Multi-point Analysis
Single point and automated multi-point analyses allow high quality spectra to be acquired from either a single position, or from a number of user defined points across the sample. Element peaks are automatically located and labelled, and quantitative analysis down to ppm levels can be carried out using the fundamental parameters method (FPM), FPM with single standard, and full standard sample calibration.Thickness calculations can also be made on nm and µm thick multi-layered structures.
Hyperspectral Mapping Analysis
The SmartMap imaging software records a full EDXRF spectrum at each and every pixel of the element image, enabling post-acquisition element image generation and comparison, and spectrum generation from user defined regions in the image with subsequent qualitative and quantitative characterisation.
Transmitted X-ray imaging provides additional insight into a sample’s structure, allowing features invisible by eye to become immediately apparent.
- Elements: Na to U
- X-ray tube: Rh target / Tube voltage 50kV / Tube current 1mA
- Fluorescent X-ray detector: Peltier cooled Silicon Drift Detector (SDD)
- Transmitted X-ray detector: Nai(Tl) scintilltor
- X-ray guide tube: Mono capillary 10μm / 100μm with no filter
- Optical image: Full sample optical image and coaxial magnification image
- Sample stage size: XY : 100mm×100mm
- Sample chamber: Vacuum chamber model/ Max 300mm×300mm×80mm in vacuum
- Signal processing: Digital pulse processor ( INCA unit )
- Qualitative analysis: Auto identification / KLM marker / Peak search / Compare spectrum
- Quantitative analysis: Non standard FPM / Standard FPM / Standard file matching FPM /Calibration curve / Multi layer FPM (Thickness gage) /Multi point analysis (Max5000) / Multi point result send to Excel / XGT-5000 spectrum view
- Mapping function: Transmitted X-ray image / Elemental image / Spectrum mapping / Rectangle mapping / Generate spectrum / RGB composition / Scale maker / Line analysis
- Other function: Possible to start the XGT-5200 software simultaneously.
PT. HORIBA Indonesia
Ruko Jalur Sutera Jl. Jalur Sutera Blok 20 A No. 16-17 Tangerang, Banten 15144, Indonesia
Tel: +62 (21) 30448525
Fax: +62 (21) 30448521