Smart SE

The Smart SE ellipsometer is a cost effective thin film tool with no compromise on features,  delivering research grade performance at an economical price. It provides an integrated vision system for accurate spot positioning, seven automated micro spots with size ranging down to a few tens of microns for measurement of small features, and the ability to measure the complete 16-element Mueller matrix in just a few seconds for the study of complex samples.

The flexible design of the Smart SE allows for optional automation of both the sample stage and the goniometer for mapping samples or acquiring data at multiple angles of incidence automatically.  The Smart SE can also be placed onto a deposition chamber for in-situ measurements.   It matches any application or budget for a wide variety of application areas including microelectronics, solar, displays, optical coatings, surface treatments and organic compounds.

Manufactured by HORIBA Scientific

Standard Configurations

Spectra range:

450nm to 1000nm

Spectra resolution

Better than 3nm

Light source

Combined Halogen and Blue LED

Measurement time

<1sec to 10 sec

Beam size

75µm * 150µm, 100µm * 250µm,

100µm * 500µm, 150µm * 150µm,

250µm * 250µm, 250µm * 500µm,


Angle of incidence

450 to 900 by step of 50

Sample size

Up to 200mm

Sample alignment

Manual 17mm height adjustement and tilt


100cm * 46cm * 23cm(W*H*D)


Straight-through air accuracy

Ψ=450±0.050 Δ=00±0.20

Thickness accuracy on 1000 Å Oxide


Thickness repeatability on 1000 Å Oxide



  •     Automated angle of incidence from 450 to 900 by step of 0.01
  •     Motorized stage for 200mm and 300mm sample sizes
  •     In-situ adjustable flanges for mounting on process chamber
  •     Heating and cooling stages
  •     Liquid and electrochemical cells
  •     Cross hair auto-collimation system

Tags: ellipsometer, thin film

PT. HORIBA Indonesia

Ruko Jalur Sutera Jl. Jalur Sutera Blok 20 A No. 16-17 Tangerang, Banten 15144, Indonesia

Tel: +62 (21) 30448525
Fax: +62 (21) 30448521