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Spectroscopic Ellipsometry Solutions for Thin Film Analysis

Spectroscopic ellipsometry is a surface sensitive, non-destructive, and non-intrusive optical metrology technique widely used to determine thin film thickness and optical constants (n, k). Spectroscopic ellipsometry is ideal for a wide range of thin film applications from fields such as semiconductors, solar, optoelectronics, optical and functional coatings, surface chemistry, and biotechnology. For more information on thin film characterization and analysis using spectroscopic ellipsometry, please visit our Ellipsometry Academy, which will provide a tutorial, webinars and videos, and some FAQ’s to help you with your thin film analysis.

For over 25 years, HORIBA Scientific has provided a wide range of spectroscopic ellipsometers, working together with the powerful & intuitive DeltaPsi 2 software, and accessories designed to meet the needs of all users interested in characterizing and analyzing thin film samples. With a wavelength range from VUV to NIR and the capability to perform ex-situIn-Situ and In-Linein-situin-line, and large area spectroscopic ellipsometry measurements on all types of thin film samples, HORIBA Scientific’s spectroscopic ellipsometers provide the most sensitive ellipsometric measurements because of the use of stationary phase modulation technologies and the extensive experience in optics from Jobin Yvon. Feel free to contact us regarding your thin film measurement and analysis needs!

UVISEL 2: The ultimate solution to every challenge in thin-film measurement HORIBA Scientific has invented the new generation of scientific spectroscopic ellipsometer that delivers the highest level of performance for nano and micro layer characterization.

High Precision R&D Spectroscopic Ellipsometer The UVISEL ellipsometer range offers the best combination of modularity and performance for thin film characterizations. Based on phase modulation technology, the UVISEL ellipsometers delivers high accuracy and high resolution measurements with an excellent signal to noise ratio.

Products: UVISEL Plus: 190-920 nm | NIR Option: 2100 nm Measure thin film thickness and optical constants. The reference ellipsometer for research and process development.

A versatile spectroscopic ellipsometer covering a range from VUV to NIR The UVISEL 2 VUV is a new generation of phase modulation ellipsometer for VUV measurements. It is the only spectroscopic ellipsometer on the market designed to deliver the fastest thin film measurements over the largest wavelength range, from 147 to 2100 nm.

Auto SE: Designed for your thin film measurements, to deliver maximum efficiency with simplicity The Auto SE is a new thin film measurement tool that allows full automatic analysis of thin film samples with simple push button operation.

A modular spectroscopic ellipsometer for everyday thin film characterization. Smart SE: a Powerful and Cost Effective Spectroscopic Ellipsometer The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements.

HORIBA Scientific’s in- situ, in-line and large area ellipsometers are designed for the control of processes in research and industry.From in-situ thin film monitoring to large area uniformity mapping and in-line characterization of flexible devices, we offer a large range of solutions for thin film quality control.

Powerful and Advanced DeltaPsi 2 Software HORIBA Scientific’s spectroscopic ellipsometers are driven by the powerful and advanced DeltaPsi 2 software, designed for accurate and flexible measurement and characterization of thin film structures.

A large array of options and accessories is available for HORIBA Scientific’s Spectroscopic Ellipsometers to enhance and expand instrument performance and versatility. The modular design of our spectroscopic ellipsometers allows the instrument to be easily upgraded during its lifetime to best suit changing application requirements.


PT. HORIBA Indonesia

Ruko Jalur Sutera Jl. Jalur Sutera Blok 20 A No. 16-17 Tangerang, Banten 15144, Indonesia

Tel: +62 (21) 30448525
Fax: +62 (21) 30448521