Flex-CLUE is the ideal flexible package to handle highperformance CL analysis, for a wide range of applications, within an affordable budget. Based on a dedicated fiber-optic interface, Flex- CLUE offers a compact and remote CL solution perfectly adapted to an SEM environment where space or access is limited.


  • Maintains original SEM functionality
  • High-efficiency CL signal-collection
  • Flexible spectral CL analysis

Manufactured by HORIBA Scientific


  • High efficiency optics designed to match fiber with spectrometer aperture

Collection interface

  • 200 mm retraction mechanism
  • Manual version
  • Fine adjustment under vacuum
  • Diamond–turned mirror
  • Short working-distance mirror in option


  • Focal length from 140 to 320 mm
  • Large choice of diffraction gratings
  • Single or dual-port


  • Panchromatic imaging
  • Monochromatic imaging
  • Spectral analysis
  • Hyperspectral spectroscopy analysis
  • Multiple detection options (up to 2)
  • Large choice of detectors
    • Single or multi-channel
    • Thermoelectric or cryogenic cooling
    • UV, visible or near-IR

 Spectral coverage

  • UV-Visible optical fiber 200-1000 nm
  • Visible-near-IR optical fiber 400-1700 nm

CL ouputs

  • Up to 1

Electron beam control

CLLINK Controller:

  • Multiple acquisition processing
    (Analog, pulse mode, SE)
  • Mapping, line scan, point measurement
  • Complete synchronization with detection
  • Control by external scan input on SEM


  • LabSpec Spectroscopy and Imaging suite


  • Evaluation of phosphor for white LED by CL method
  • Electrical and optical properties of the small-angle grain boundaries(SA-GBs)
  • Defect evaluation of GaN epitaxial wafer by CL
  • The evaluation of phosphor for white LEDs by CL
  • Luminescent defects in synthetic CVD diamond films localize by Cathodoluminescence spectroscopy

Tags: CL, Cathodoluminescence

PT. HORIBA Indonesia

Ruko Jalur Sutera Jl. Jalur Sutera Blok 20 A No. 16-17 Tangerang, Banten 15144, Indonesia

Tel: +62 (21) 30448525
Fax: +62 (21) 30448521
Email: info-sci.id@horiba.com