X-ray fluorescence (XRF) presents a powerful technique for non-destructive elemental composition and thickness analysis of multi-layered coating structures. The penetrating nature of X-rays means that multiple layers can be analysed simultaneously in a single measurement. Layers ranging from just a few nanometers up to hundreds of micrometers can be analysed, depending on their elemental composition.
With XRF microscopes it is possible to combine these capabilities with high spatial resolutions. Thus it is possible to selectively analyse coatings on individual components, or to investigate coating homogeneity across a sample.
- Bonding pads
- Biomedical devices and implants
- Precious metals and jewellery
- Solar cells
- Non-ferrous metals
Variations of gold and nickel layer thicknesses, acquired across the bonding pad region shown in the optical image.
Layer thickness analysis results from a bonding pad on a circuit board, showing nanometer resolution thickness analysis.